Jul 9, 2019

Highly Uniform Electroluminescence from 150 and 200 mm GaN-on-Si-Based Blue Light-Emitting Diode Wafers

We report on the on-wafer device characteristics of 150 and 200 mm GaN-on-Si-based blue LED wafers grown by metalorganic chemical vapor deposition on Si(111) substrates with electroluminescence at 447 nm. Excellent uniformity was achieved with standard deviations of 3.9% for the electroluminescence intensity, 0.6–0.8% for the peak wavelength and 1.3% for the forward voltage. The high uniformity confirms the viability of the GaN-on-Si technology on large-diameter substrates for next-generation LED manufacturing. The reverse bias current leakage mechanism is also investigated to provide an insight into improving device reliability.


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